Specifically, PEEK wafer cassette are designed to transport different types of semiconductor wafers, and semiconductor materials of the third generation like silicon, germanium, gallium arsenide, and others.
They function as shields during the processing, movement, and storage of wafers to ensure that the wafers do not come in contact with contaminants when moving and while in storage.
PEEK material performs well on ant-static properties as well as low degassing characteristics this assists in the reduction of particle contaminants hence enhancing the quality of wafers.
| size | Capacity | D1 Pitch | Slot pitch | bottom width |
| 4" | 25 | 14.53mm(0.57") | 4.76mm(0.19") | 1.52mm(0.06") |
| 4 1/8" | 12 | 21.26mm(0.84") | 9.5mm(0.37") | 6.28mm(0.25") |
| 6“ | 25 | 14.53mm(0.57") | 4.76mm(0.19") | 1.52mm(0.06") |
| 6.25" | 12 | 18.92mm(0.74") | 9.52mm(0.37") | 3.81mm(0.15") |
| 6.25" | 25 | 14.54mm(0.57") | 4.76mm(0.19") | 1.52mm(0.06") |
| 8" | 25 | 25.4mm(1") | 6.35mm(0.25") | 1.7mm(0.07") |
Not recommended, only for dry transfer
PEEK Wafer Cassettes also have customization services enabling it to meet special production needs, as is important in the semiconductor industry where standard products might not completely match equipment interfaces, type of wafers or environmental factors. Structural customization is usually done to adjust the dimensions, slot shapes, material additions, or features to enhance compatibility and efficiency. As an example, wafer diameter (75mm to 300mm) slot widths can be modified, laser engraving, RFID integration and automated inventory control may be implemented or electrostatic dissipative finishing may be used to avoid contamination. Color customization is also possible, it is possible to mix carbon fiber to increase rigidity, and specifications such as widened slots (to thicker wafers) or a coating resistant to chemicals such as Teflon PFA can be added. The customization follows the standards of SEMI, which promote an easy integration into automated devices such as robotic arms and typically the delivery times are 4-8 weeks depending on the complexity. The flexibility is perfect in high-precision processes like CVD or diffusion in high temperature transfers.
| Customization Category | Specific Options | Typical Parameters | Benefits |
| Dimensions and Capacity | Wafer diameter adjustments (75mm, 100mm, 150mm, 200mm, 300mm); Slot count modifications (12, 22, 25 slots) | Slot width: Adjustable 1.5-3mm; Dimensions: Compliant with SEMI M31 standards | Accommodates various wafer thicknesses, reduces slippage risk, enhances automation compatibility |
| Slot Design | Widened slots, open/closed slots, optimized bevel angles | Slot spacing: 10-15mm; Angle: 5-10° | Facilitates wafer insertion/removal, suitable for thick or thin wafers, reduces damage |
| Material Enhancements | Carbon fiber blending, ESD coating (electrostatic dissipative), nanomaterial additives | Surface resistivity: 10^6-10^9 Ω/sq; Colors: Black/natural/custom | Improves wear resistance and static protection, ideal for cleanroom environments |
| Additional Features | Laser engraving, RFID integration, chemical-resistant coatings (e.g., PFA or PPS) | RFID frequency: 13.56MHz; Engraving depth: 0.1-0.5mm | Enables tracking and automation, boosts production efficiency |
| Other Special Requirements | Machine interface compatibility, color customization | Temperature resistance: Continuous 120°C, peak 340°C | Matches specific equipment, enhances overall durability |
| Attribute | PEEK Wafer Cassette | PFA Wafer Cassette | Advantage Comparison (PEEK vs PFA) |
| Temperature Resistance | Continuous 120°C, peak 340°C | Continuous 100°C, peak 260°C | PEEK excels in high-temperature processes like CVD and diffusion |
| Chemical Resistance | Good (resists most solvents, not suitable for strong acid immersion) | Excellent (fully fluorinated, resists strong acids and bases) | PFA outperforms in chemical cleaning processes |
| Mechanical Strength | High rigidity, wear-resistant (tensile strength ~100 MPa) | Moderate (tensile strength ~25 MPa) | PEEK is more durable, with longer lifespan (twice that of PPS) |
| Static Protection | ESD-safe, carbon fiber blending available | Good, but requires additional coating | PEEK integrates ESD functionality more easily |
| Cost | Higher (premium applications) | Moderate | PEEK offers greater value for long-term investment |
| Typical Applications | Dry transfers, high-temperature baking | Wet chemical processes | PEEK excels in temperature resilience, PFA in chemical compatibility |
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