The wafer cassette is used for handling and storage of wafer carrier, the main role is to connect to different production machines' micro-environment box reaction chambers, to prevent wafer particle contamination, to improve handling and storage reliability and transportation efficiency, various sizes of the wafer chip to meet the needs of different areas and different levels of the chip, so wafer box in the existence of different sizes.
The peek Carrier Wafer is suitable for transferring wafers during the manufacturing process, with the wafer clip can store and transport wafers, storage, and transfer reliability.
Specifically, PEEK wafer cassette are designed to transport different types of semiconductor wafers, and semiconductor materials of the third generation like silicon, germanium, gallium arsenide, and others.
They function as shields during the processing, movement, and storage of wafers to ensure that the wafers do not come in contact with contaminants when moving and while in storage.
Because PEEK material performs well on ant-static properties as well as low degassing characteristics this assists in the reduction of particle contaminants hence enhancing the quality of wafers.
PEEK Carrier Wafer Specifications
| size | Capacity | D1 Pitch | Slot pitch | bottom width |
|---|---|---|---|---|
| 4" | 25 | 14.53mm(0.57") | 4.76mm(0.19") | 1.52mm(0.06") |
| 4 1/8" | 12 | 21.26mm(0.84") | 9.5mm(0.37") | 6.28mm(0.25") |
| 6“ | 25 | 14.53mm(0.57") | 4.76mm(0.19") | 1.52mm(0.06") |
| 6.25" | 12 | 18.92mm(0.74") | 9.52mm(0.37") | 3.81mm(0.15") |
| 6.25" | 25 | 14.54mm(0.57") | 4.76mm(0.19") | 1.52mm(0.06") |
| 8" | 25 | 25.4mm(1") | 6.35mm(0.25") | 1.7mm(0.07") |
PEEK Carrier Wafer can achieve an anti-static level, and the surface resistivity reaches 10⁶-109
The process of loading PEEK Carrier Wafer will not produce fine wear debris to contaminate the wafer clip.
PEEK wafer cassette can resist corrosion from various chemicals during wafer cleaning,
PEEK Carrier Wafer has high rigidity, which can not only resist deformation caused by external forces but also ensure the packaging accuracy between components.
The amount of gas released at room temperature or even high-temperature environment is minimal, which can meet the high requirements of a wafer cassette for gas cleanliness.
PEEK Carrier Wafer can meet the drying temperature requirements of 150-260 degrees Celsius, and the size of the product will not change.
